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Microcontamination and Live Gas Testing
 
Article Title Published/Presented Year
Contamination Control in Carbon Monoxide Processes Solid State Technology 2002
Corrosion Resistance of Cost Effective Alternative Materials for Semiconductor Gas Distribution Systems Semicon West 2002 2002
Detection and Control of Oxy-Impurities in Group V hydride Gases and Gas Delivery Systems Compound Semiconductor Manufacturing Exposition 2001
Dry Down Characterization of Diaphragm Solid State Technology 2000
UltraHigh Purity Bulk Specialty Gas Package for 300mm Wafer Fabrication Semicon West 1999 1999


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