Nanochem Purification Overview

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Nanochem Gas Purifiers are designed for Ultra High Purity applications – including comprehensive solutions for source, point-of-use, bulk, and proximate purification – delivering up to nine 9’s purity gas.

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Since 1985, MATHESON Nanochem® purifiers have provided unprecedented purification solutions serving a wide range of industries including semiconductor manufacturing, LED production, energy processes, welding, and many more.

Learn more about Nanochem capabilities - get the Nanochem Purifier Overview Brochure.

Go to the Nanochem Product Data page on this website to learn more about Nanochem:

  • hardware configurations 
  • purification media

L-300 Purifier

 

Nanochem® purifiers combine gas-specific purification media and ultra-high purity hardware in one system to eliminate impurities caused by:

  • Upstream leaks
  • Improper cylinder change-outs
  • Increasing impurity concentration during gas cylinder depletion
  • Gas system component contamination
  • Virtual leaks from component / piping "dead pockets" and soft seats

Nanochem® purifiers offer the highest lifetimes and the best efficiencies for impurity removal. Nanochem purifiers are available for:

  • Silicon-source gases
  • Nitride gases
  • Etchants
  • Purge gases
  • Dopant gases
  • Carrier gases

 

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Oxygen, moisture and other contaminants are removed to < 100 ppt (parts per trillion) and are limited only by the detection limits of even state-of-the-art analytical instrumentation.

Compact and easy to use, Nanochem® purifiers can be installed within the gas cabinet or at the process tool. Most purifiers require no heating or cooling and are capable of handling a broad range of flows and pressures.

MATHESON has one of the most extensive, in-house evaluation laboratories in the industry to assess the quality of gas system components. The benefit is that components selected for Nanochem® purification products are of the highest quality available.

"Live gas" testing is done to ensure purifiers meet or exceed performance specifications in the specific process gas for which they are marketed.

 

Purification Performance Benefits & Applications

Nanochem® purifiers offer a number of benefits, such as reduced equipment downtime and protection against fluctuations in gas supply quality and upstream system upsets. Typical performance benefits for the semiconductor / compound semiconductor industry are:

  • Increased carrier concentration, increased mobility
  • Faster crystal growth rates
  • Improved uniformity of surface morphology
  • Fewer defects in epi layers and substrates
  • Longer equipment life & reduced component corrosion

Semiconductor applications include manufacture of ICs and high brightness LEDs. Welding applications include piping for semiconductor fabs, manufacture of aerospace components, and manufacture of process equipment for chemical and biotech industries.

 

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Purification

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Gases We Purify (partial listing) 

Acetylene

Hydrogen

Air

Hydrogen Bromide

Ammonia

Hydrogen Chloride

Argon

Hydrogen Fluoride

Argon (welding)

Hydrogen Selenide

Arsine

Hydrogen Sulfide

Arsine (1-10%)

Isobutane

Boron Trchloride

Krypton

Boron Trifluoride

Methane

Butane

Methyl Fluoride

Butene

Methyl Silane

Carbon Dioxide

Methylchloride

Carbon Disulfide

MethylMercaptan

Carbon Monoxide

Monochlorosilane

Carbon Tetrachloride

Monomethyl Silane

Carbon Tetrafluoride

Neon

Carbonyl Sulfide

Nitric Oxide

Chlorine

Nitrogen

Chlorocarbons

Nitrogen Dioxide

Clean Dry Air

Nitrous Oxide

Cyclo-hydrocarbons

Octafluorocyclobutane

Deuterium

Octafluorocyclopentene

Diborane

Octafluoropropane

Dichlorosilane

Oxygen

Difluoromethane

Ozone

Disilane

Perfluorobutane

Ethane

Phosgene

Ethylene

Phosphine

Fluorocarbons

Phosphine (1-10%)

Germane

Propane

Germane (1-10%)

Propylene

Germanium Tetrachloride

Silane

Germanium Tetrafluoride

Silicon Tetrachloride

Halocarbons

Silicon Tetrafluoride

Helium

Sulfur Dioxide

Hexafluorobutadiene

Sulfur Hexafluoride

Hexafluoroethane

Trichlorosilane

Hexafluoropropylene

Trifluoromethane

Hydrocarbons

Xenon