Purification for Electronics Applications

10_Purification of gases used in electronics

Nanochem Gas Purifiers for Electronics Applications such as fabrication of Si-based logic and memory integrated circuits, LEDs, and Flat Panel Displays.

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Nanochem® Gas Purifiers enable the "extreme purification" of gases used in wafer and semiconductor fabrication, including the removal of dopants and volatile metals.

"Live gas" testing is done to ensure that Nanochem® gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.

Nanochem® purifiers remove:

  • moisture (water)
  • hydrocarbons
  • halocarbons
  • carbon dioxide
  • oxygen
  • dopants
  • volatile metals
  • more

Please inquire regarding specific impurities of interest to your application.

On this page is a list of gases we purify using Nanochem® gas purifiers.

If a gas of interest to your application does not appear here, please Contact Us.

 

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Gases We Purify (partial listing)

Acetylene

Hydrogen

Air

Hydrogen Bromide

Ammonia

Hydrogen Chloride

Argon

Hydrogen Fluoride

Argon (welding)

Hydrogen Selenide

Arsine

Hydrogen Sulfide

Arsine (1-10%)

Isobutane

Boron Trchloride

Krypton

Boron Trifluoride

Methane

Butane

Methyl Fluoride

Butene

Methyl Silane

Carbon Dioxide

Methylchloride

Carbon Disulfide

MethylMercaptan

Carbon Monoxide

Monochlorosilane

Carbon Tetrachloride

Monomethyl Silane

Carbon Tetrafluoride

Neon

Carbonyl Sulfide

Nitric Oxide

Chlorine

Nitrogen

Chlorocarbons

Nitrogen Dioxide

Clean Dry Air

Nitrous Oxide

Cyclo-hydrocarbons

Octafluorocyclobutane

Deuterium

Octafluorocyclopentene

Diborane

Octafluoropropane

Dichlorosilane

Oxygen

Difluoromethane

Ozone

Disilane

Perfluorobutane

Ethane

Phosgene

Ethylene

Phosphine

Fluorocarbons

Phosphine (1-10%)

Germane

Propane

Germane (1-10%)

Propylene

Germanium Tetrachloride

Silane

Germanium Tetrafluoride

Silicon Tetrachloride

Halocarbons

Silicon Tetrafluoride

Helium

Sulfur Dioxide

Hexafluorobutadiene

Sulfur Hexafluoride

Hexafluoroethane

Trichlorosilane

Hexafluoropropylene

Trifluoromethane

Hydrocarbons

Xenon