Nanochem Technical Papers and Information Library

50_technical_library

The Nanochem Technical Library contains a partial list of technical resources covering analytical efficacy, process applications and demonstrated affect on end products such as wafers and devices.

logostripe

The tables below list technical papers, posters, and publications relevant to Nanochem Gas Purifier materials that are separated by usage with different gas types.

The purifier material type (Metal-X, NHX, OMX, etc.) is listed on the left and the name of the publication is listed on the right. Click on the name of the publication to view and/or download a copy.

Corrosives

 
CleanCorr Anhydrous Hydrogen Fluoride for Selective Etch Processes:  Measurement and Control of Water and Metallic Impurities
 
Metal-X NANOCHEM® Metal-X™ Corrosive Gas Purification
 
Metal-X High Pressure POU Purification of Corrosive Gases
 
Metal-X Measurement and Control of Trace Moisture in Corrosive Gases
 
Metal-X Moisture requirement in RPCVD Si epitaxy
 
Metal-X Contamination Control in Carbon Monoxide Processes
 
Metal-X Removal of Volatile Metals from Corrosive Gases by a New Purifier
 
Metal-X Advances in Purifier Technology: Removal of Volatile Metal Complexes and Moisture From HCl and CO Etch Gases
 
Metal-X New Corrosive Gas Purifier Offers Improved Moisture Performance and Removal of Volatile Metal Complexes
 
Metal-X SemiCon West 2001 - Removal of Volatile Metals from Corrosive Gases by a New Purifier

 

logostripe

Hydrides

 
ASX-II  Characterization of High-Purity Arsine and Gallium Arsenide Epilayers Grown 
 
PHX Trace Moisture Contamination in UHP PH3 Techniques for Measurement and Control
 
PHX Factors Influencing the Purity of Electronic Grade Phosphine Delivered to MOCVD Tools
 
ASX,NHX,PHX Detection and Control of Oxy-Impurities in Group V Hydride Gases and Gas Delivery Systems
 
OMX, PHX,
ASX, ASX-II
Review of Integrated Contamination Control for GaAS and InP MOVCD Process
 
OMA Evaluation Of Commercial Ammonia Purifiers
 
OMA Using tunable diode laser spectroscopy to detect trace moisture in  ammonia
 
OMA, NHX,
NHX-plus, In2Go
Identification and Quantification of Impurities Critical to the Performance on Nitride
 
NHX, NHX-plus, In2Go Impurities in Hydride Gases Part 1
 
NHX, NHX-plus, In2Go Impurities in Hydride Gases Part 2
 
NHX-plus Measurement and Control of Trace Carbon Dioxide in Ultra-High Purity Ammonia for the Semiconductor Industry
 
NHX-plus Effect of Moisture in Ammonia on LED Device Performance Poster Final -  ICMOVPE 2010

 

logostripe

Non-Methane Hydrocarbons

 
HCX New Purifier Material for Hydrocarbon Removal from Process Gases

 

logostripe

Welding

 
OMX  How Weld Torch Hose Materials Affect Shielding Gas Quality
 
OMX  Porosity in Aluminum Welding 
 
OMX  Getting it Right Gases in Welding
 
OMX Shielding Gas Quality Improves Weld Quality
 
OMX, In2Go, WeldAssure Nanochem - Welding

 

logostripe

Abatement

 
Ultimasorb Developments in Abatement Technology for MOCVD Processing

 

logostripe

Desulfurization

 
GuardBed Presentation on GuardBed Information
 
GuardBed General Information on Desulfurization Materials, Capabilities and Applications
 
GuardBed Products for Desulfurization of Hydrocarbons
 
GuardBed Products for Natural Gas
 
GuardBed Turnkey Desulfurization/Purification Solutions
 
GuardBed Products for Liquid Fuels
 
GuardBed Hydrocarbon Feed Stream vs. GuardBed Product Cross Reference Table

 

logostripe

Purification

nanochem product data

industries served by nanochem gas purifiers

Nanochem Configuration Button

purifier payment plan

request purifier quotation