MATHESON:  Provider of gas handling equipment for gas detection, purification, management and control, specialty gases, safe delivery sources, and portable gas solutions.
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Essential Materials for Semiconductor Manufacturing

MATHESON:  Provider of gas handling equipment for gas detection, purification, management and control, specialty gases, safe delivery sources, and portable gas solutions.
Welcome to MATHESON semiconductor products!

Our mission is to deliver the highest degree of safety, quality and technology in the materials you need for any semiconductor manufacturing process. We are at your disposal to provide you with whatever you will need: if not listed in these pages, please drop us a note (Link 5) and we will let you know how we can help.

Thank you in advance for visiting our pages.
Semiconductor Pure Gases
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbonyl Sulfide
Chlorine
Deuterium
Dichlorosilane
Disilane
Ethane
Ethylene
Germane
Halocarbon 116 (Hexafluoroethane)
Halocarbon 14 (Tetrafluoromethane)
Halocarbon 218 (Perfluoropropane)
Halocarbon 23 (Trifluoromethane)
Halocarbon 32 (Difluoromethane)
Halocarbon 41 (Methyl Fluoride)
Halocarbon 4110 (Octafluorocyclopentene)
Halocarbon C318 (Octafluorocyclobutane)
Helium
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Fluoride
Hydrogen Selenide
Hydrogen Sulfide
Krypton
Methane
Methyl Silane
Neon
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Nitrous Oxide
Oxygen
Phosphine
Propylene
Silane
Silcore
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Hexafluoride
Trichlorosilane
Trimethylsilane
Tungsten Hexafluoride
Xenon
Semiconductor Gas Mixtures
General Information
Arsine
Diborane
Phosphine
Silane
Safe Delivery Gas Sources
Arsenic Pentafluoride SDS2®
Arsine SDS2®
Enriched Boron Trifluoride SDS2®
Germanium Tetrafluoride SDS2®
Enriched 72 Germanium Tetrafluoride SDS2®
Hydrogen Selenide SDS2®
Phosphine SDS2®
Phosphorus Trifluoride SDS2®
Silicon Tetrafluoride SDS2®
Arsine, Phosphine, Boron Trifluoride SDS3®
SDS2® & SDS3® Catalog Pages
Hydride Gas Sources
Safe High Capacity Storage
Boron Trifluoride Gas Sources
Natural Abundance BF3
Isotopically Enriched BF3
User Guide
Compound Semiconductor Gases
The Compound Semiconductor Initiative
Arsine AsH3 ULTIMA 6N5 Purity
Arsine AsH3 ULSI 6N and 5N5 Purity
Arsine AsH3 ULSI 5N7 Purity
Phosphine PH3 ULTIMA 6N Purity
Phosphine PH3 ULSI 5N7 and 5N4 Purity
Ammonia NH3 ULTIMA 6N4 Purity
Ammonia NH3 ULSI 5N5 and 5N Purity

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