Gas Purification Optimized for Semiconductor Fabrication Applications.
NANOCHEM® Gas Purifiers enable the extreme purification of gases used in wafer and semiconductor fabrication, including the removal of dopants and volatile metals.
Live gas testing is done to ensure that NANOCHEM® gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.
NANOCHEM® purifiers remove:
- moisture (water)
- hydrocarbons
- halocarbons
- carbon dioxide
- oxygen
- dopants
- volatile metals
- more
Please inquire regarding specific impurities of interest to your application.
Gases We Purify
If a gas of interest to your application does not appear here, please Contact Us.
| Gas | |
|---|---|
| Air | Air |
| Ar | Argon |
| Ar (weld) | Argon (welding) |
| AsH3 | Arsine |
| AsH3 | Arsine (1-10%) |
| BCl3 | Boron Trichloride |
| BF3 | Boron Trifluoride |
| C2F6 | Hexafluoroethane |
| C2H2 | Acetylene |
| C2H4 | Ethylene |
| C2H6 | Ethane |
| C3F6 | Hexafluoropropylene |
| C3F8 | Octafluoropropane |
| C3H6 | Propylene |
| C3H8 | Propane |
| C4F10 | Perfluorobutane |
| C4F6 | Hexafluorobutadiene |
| C4F8 | Octafluorocyclobutane |
| C4H10 | Butane |
| C4H10 | Isobutane |
| C4H8 | Butene |
| C5F8 | Octafluorocyclopentene |
| CCl2O | Phosgene |
| CCl4 | Carbon Tetrachloride |
| CDA | Clean Dry Air |
| CF4 | Carbon Tetrafluoride |
| CH2F2 | Difluoromethane |
| CH3Cl | Methyl Chloride |
| CH3SH | Methyl Mercaptan |
| CH3SiH3 | Monomethyl Silane |
| CH4 | Methane |
| CH3F | Methyl Fluoride |
| CHF3 | Trifluoromethane |
| Chlorocarbons | Chlorocarbons |
| Cl2 | Chlorine |
| CO | Carbon Monoxide |
| CO2 | Carbon Dioxide |
| COS | Carbonyl Sulfide |
| CS2 | Carbon Disulfide |
| Cyclo-hydrocarbons | Cyclo-hydrocarbons |
| D2 | Deuterium |
| Fluorocarbons | Fluorocarbons |
| GeCl4 | Germanium Tetrachloride |
| GeF4 | Germanium Tetrafluoride |
| GeH4 | Germane |
| GeH4 | Germane (1-10%) |
| H2 | Hydrogen |
| H2S | Hydrogen Sulfide |
| H2Se | Hydrogen Selenide |
| Halocarbons | Halocarbons |
| HBr | Hydrogen Bromide |
| HCl | Hydrogen Chloride |
| He | Helium |
| HF | Hydrogen Fluoride |
| Hydrocarbons | Hydrocarbons |
| Kr | Krypton |
| N2 | Nitrogen |
| N2O | Nitrous Oxide |
| Ne | Neon |
| NH3 | Ammonia |
| NO | Nitric Oxide |
| NO2 | Nitrogen Dioxide |
| O2 | Oxygen |
| O3 | Ozone |
| PH3 | Phosphine |
| PH3 | Phosphine (1-10%) |
| SF6 | Sulfur Hexafluoride |
| Si2H6 | Disilane |
| SiCl4 | Silicon Tetrachloride |
| SiClH3 | Monochlorosilane |
| SiCl2H2 | Dichlorosilane |
| SiCl3H2 | Trichlorosilane |
| SiF4 | Silicon Tetrafluoride |
| SiH3CH3 | Methyl Silane |
| SiH4 | Silane |
| SO2 | Sulfur Dioxide |
| Xe | Xenon |
