• Skip to main content
  • Skip to primary sidebar
  • About Us
  • Contact Us
  • Store Locator
  • Safety Data Sheets (SDS)
  • Shop Online
  • Sustainability
  • Newsroom
  • Careers

MATHESON

The Gas Professionals

  • Gases
    • Search All Gases
    • Supply Options
  • Gas Equipment
    • Regulators
    • Flow Measurement
    • Gas Handling
    • Filters and Purifiers
    • Nanochem >
      • Ultrapurification Overview
      • Ultrapurification for Electronics
      • Ultrapurification for Welding
      • Desulfurization
      • Ultrapurification Media and Hardware
    • Gas Detection
    • Smart Devices
    • Custom Manufacturing
  • Industries
    • Welding >
      • Welding Gases
      • Welding Expertise
      • Welding Retail Locations
    • Food/Wine/Beer >
      • Food Freezing
      • Food Preservation
      • Wine
      • Beer
      • Beverage
    • Medical/Healthcare
    • Biotechnology >
      • Medical Imaging
    • Fuels and Refining
    • Chemical/Petrochemical
    • Electronics
    • Laboratory
  • Plants & Engineering
    • HyCO – Syngas
    • Air Separation
    • Pipeline Gas Delivery
    • Site Services
    • Engineering Services
  • Safety Products

Ultrapurification for Electronics

Nanochem
Overview

Electronics

Welding

Desulfurization

Media and
Hardware

Gas Purification Optimized for Semiconductor Fabrication Applications.

Nanochem® Gas Purifiers enable the extreme purification of gases used in wafer and semiconductor fabrication, including the removal of dopants and volatile metals.

Live gas testing is done to ensure that Nanochem gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.

Nanochem purifiers remove:

  • moisture (water)
  • hydrocarbons
  • halocarbons
  • carbon dioxide
  • oxygen
  • dopants
  • volatile metals
  • more

Please inquire regarding specific impurities of interest to your application.

Gases We Purify

Nanochem Media Overview 

If a gas of interest to your application does not appear here, please Contact Us.

Gas
 AirAir
 ArArgon
 Ar (weld)Argon (welding)
 AsH3Arsine
 AsH3Arsine (1-10%)
 BCl3Boron Trichloride
 BF3Boron Trifluoride
 C2F6Hexafluoroethane
 C2H2Acetylene
 C2H4Ethylene
 C2H6Ethane
 C3F6Hexafluoropropylene
 C3F8Octafluoropropane
 C3H6Propylene
 C3H8Propane
 C4F10Perfluorobutane
 C4F6Hexafluorobutadiene
 C4F8Octafluorocyclobutane
 C4H10Butane
 C4H10Isobutane
 C4H8Butene
 C5F8Octafluorocyclopentene
 CCl2OPhosgene
 CCl4Carbon Tetrachloride
 CDAClean Dry Air
 CF4Carbon Tetrafluoride
 CH2F2Difluoromethane
 CH3ClMethyl Chloride
 CH3SHMethyl Mercaptan
 CH3SiH3Monomethyl Silane
 CH4Methane
 CH3FMethyl Fluoride
 CHF3Trifluoromethane
 ChlorocarbonsChlorocarbons
 Cl2Chlorine
 COCarbon Monoxide
 CO2Carbon Dioxide
 COSCarbonyl Sulfide
 CS2Carbon Disulfide
 Cyclo-hydrocarbonsCyclo-hydrocarbons
 D2Deuterium
 FluorocarbonsFluorocarbons
 GeCl4Germanium Tetrachloride
 GeF4Germanium Tetrafluoride
 GeH4Germane
 GeH4Germane (1-10%)
 H2Hydrogen
 H2SHydrogen Sulfide
 H2SeHydrogen Selenide
 HalocarbonsHalocarbons
 HBrHydrogen Bromide
 HClHydrogen Chloride
 HeHelium
 HFHydrogen Fluoride
 HydrocarbonsHydrocarbons
 KrKrypton
 N2Nitrogen
 N2ONitrous Oxide
 NeNeon
 NH3Ammonia
 NONitric Oxide
 NO2Nitrogen Dioxide
 O2Oxygen
 O3Ozone
 PH3Phosphine
 PH3Phosphine (1-10%)
 SF6Sulfur Hexafluoride
 Si2H6Disilane
 SiCl4Silicon Tetrachloride
 SiClH3Monochlorosilane
 SiCl2H2Dichlorosilane
 SiCl3H2Trichlorosilane
 SiF4Silicon Tetrafluoride
 SiH3CH3Methyl Silane
 SiH4Silane
 SO2Sulfur Dioxide
 XeXenon

Primary Sidebar

Contact MATHESON

800-416-2505

Question or Comment

 

Shop MATHESON

Store Locator

Shop Online

  • Facebook
  • Instagram
  • LinkedIn
  • Twitter
  • YouTube
  • About Us
  • Contact Us
  • Legal and Privacy Notices
  • Resource Center

Copyright © 2023 · MATHESON Tri-Gas, Inc.

We use cookies on our website to give you the most relevant experience by remembering your preferences and repeat visits. By clicking “Accept All”, you consent to the use of ALL the cookies. However, you may visit "Cookie Settings" to provide a controlled consent.
Cookie SettingsAccept All
Manage consent

Privacy Overview

This website uses cookies to improve your experience while you navigate through the website. Out of these, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. We also use third-party cookies that help us analyze and understand how you use this website. These cookies will be stored in your browser only with your consent. You also have the option to opt-out of these cookies. But opting out of some of these cookies may affect your browsing experience.
Necessary
Always Enabled
Necessary cookies are absolutely essential for the website to function properly. These cookies ensure basic functionalities and security features of the website, anonymously.
CookieDurationDescription
cookielawinfo-checkbox-advertisement1 yearThe cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Advertisement".
cookielawinfo-checkbox-analytics11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Analytics".
cookielawinfo-checkbox-functional11 monthsThe cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Functional".
cookielawinfo-checkbox-necessary11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Necessary".
cookielawinfo-checkbox-others11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Other.
cookielawinfo-checkbox-performance11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Performance".
viewed_cookie_policy11 monthsThe cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. It does not store any personal data.
Functional
Functional cookies help to perform certain functionalities like sharing the content of the website on social media platforms, collect feedbacks, and other third-party features.
Performance
Performance cookies are used to understand and analyze the key performance indexes of the website which helps in delivering a better user experience for the visitors.
Analytics
Analytical cookies are used to understand how visitors interact with the website. These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc.
CookieDurationDescription
_ga2 yearsThe _ga cookie, installed by Google Analytics, calculates visitor, session and campaign data and also keeps track of site usage for the site's analytics report. The cookie stores information anonymously and assigns a randomly generated number to recognize unique visitors.
_ga_KHZ6Z729DQ2 yearsThis cookie is installed by Google Analytics.
Advertisement
Advertisement cookies are used to provide visitors with relevant ads and marketing campaigns. These cookies track visitors across websites and collect information to provide customized ads.
CookieDurationDescription
IDE1 year 24 daysUsed by Google DoubleClick and stores information about how the user uses the website and any other advertisement before visiting the website. This is used to present users with ads that are relevant to them according to the user profile.
test_cookie15 minutesThis cookie is set by doubleclick.net. The purpose of the cookie is to determine if the user's browser supports cookies.
VISITOR_INFO1_LIVE5 months 27 daysThis cookie is set by Youtube. Used to track the information of the embedded YouTube videos on a website.
YSCsessionThis cookies is set by Youtube and is used to track the views of embedded videos.
Others
Other uncategorized cookies are those that are being analyzed and have not been classified into a category as yet.
CookieDurationDescription
CONSENT16 years 6 months 13 days 7 hoursNo description
yt-remote-connected-devicesneverNo description available.
yt-remote-device-idneverNo description available.
SAVE & ACCEPT
Powered by CookieYes Logo