The technical papers listed here pertain to Nanochem Metal-X media.
- NANOCHEM® Metal-X™ Corrosive Gas Purification
- Advances in Purifier Technology: Removal of Volatile Metal Complexes and Moisture From HCl and CO Etch Gases
- Moisture requirement in RPCVD Si epitaxy
- High Pressure POU Purification of Corrosive Gases
- Measurement and Control of Trace Moisture in Corrosive Gases
- Contamination Control in Carbon Monoxide Processes
- Removal of Volatile Metals from Corrosive Gases by a New Purifier
- New Corrosive Gas Purifier Offers Improved Moisture Performance and Removal of Volatile Metal Complexes
- SemiCon West 2001 – Removal of Volatile Metals from Corrosive Gases by a New Purifier
