Since 1985, MATHESON NANOCHEM® purifiers have provided unprecedented purification solutions serving a wide range of industries including semiconductor manufacturing, LED production, energy processes, welding, and many more.
Gas Purification:
High Performance Purification Media and Specialized Hardware.
NANOCHEM® purifiers combine gas-specific purification media and ultra-high purity hardware in one system to eliminate impurities caused by:
- Upstream leaks
- Improper cylinder changeouts
- Increasing impurity concentration during gas cylinder depletion
- Gas system component contamination
- Virtual leaks from component / piping dead pockets and soft seats
Gas Purification:
Long Purifier Lifetime and High Purifier Efficiency.
NANOCHEM® purifiers offer the highest lifetimes and the best efficiencies for impurity removal. NANOCHEM® purifiers are available for:
- Silicon-source gases
- Nitride gases
- Etchants
- Purge gases
- Dopant gases
- Volatile metals
- Carrier gases
Remove Oxygen, Water, and Other Contaminants to UHP Levels
Oxygen, moisture and other contaminants are removed to < 100 ppt (parts per trillion) and are limited only by the detection limits of even state-of-the-art analytical instrumentation.
Compact and easy to use, NANOCHEM® purifiers can be installed within the gas cabinet or at the process tool. Most purifiers require no heating or cooling and are capable of handling a broad range of flows and pressures.
MATHESON has one of the most extensive, in-house evaluation laboratories in the industry to assess the quality of gas system components. The benefit is that components selected for NANOCHEM® purification products are of the highest quality available.
Live gas testing is done to ensure purifiers meet or exceed performance specifications in the specific process gas for which they are marketed.
Gas Purification Performance Benefits and Applications
NANOCHEM® purifiers offer a number of benefits, such as reduced equipment downtime and protection against fluctuations in gas supply quality and upstream system upsets. Typical performance benefits for the semiconductor / compound semiconductor industry are:
- Increased carrier concentration, increased mobility
- Faster crystal growth rates
- Improved uniformity of surface morphology
- Fewer defects in epi layers and substrates
- Longer equipment life and reduced component corrosion
Semiconductor applications include manufacture of ICs and high brightness LEDs. Welding applications include piping for semiconductor fabs, manufacture of aerospace components, and manufacture of process equipment for chemical and biotech industries.
