MATHESON

The Gas Professionals

NANOCHEM®

Since 1985, MATHESON NANOCHEM® purifiers have provided unprecedented ultrapurification solutions serving a wide range of industries including semiconductor manufacturing, LED production, energy processes, welding, and many more.

NANOCHEM® Media Finder
GasNANOCHEM Purification Media
Ar Argon View Media
AsH3 Arsine View Media
AsH3 Arsine (1-10%) View Media
BCl3 Boron Trichloride View Media
BF3 Boron TrifluorideContact Us for Details
C2F6 Hexafluoroethane View Media
C2H2 Acetylene View Media
C2H4 EthyleneContact Us for Details
C2H6 Ethane View Media
C3F6 HexafluoropropyleneContact Us for Details
C3F8 Perfluoropropane View Media
C3H6 Propylene (Propene)Contact Us for Details
C3H6 Cyclopropane View Media
C3H8 Propane View Media
C4F10 Perfluorobutane View Media
C4F6 HexafluorobutadieneContact Us for Details
C4F8 OctafluorocyclobutaneContact Us for Details
C4H10 Butane View Media
C4H10 IsobutaneContact Us for Details
C4H8 ButeneContact Us for Details
C5F8 OctafluorocyclopenteneContact Us for Details
CCl2O PhosgeneContact Us for Details
CCl4 Carbon TetrachlorideContact Us for Details
CDA Clean Dry AirContact Us for Details
CF4 Carbon Tetrafluoride View Media
CH2F2 Difluoromethane View Media
CH3Cl Methyl ChlorideContact Us for Details
CH3SH Methyl MercaptanContact Us for Details
CH6Si Methyl SilaneContact Us for Details
CH4 Methane View Media
CH3F Methyl FluorideContact Us for Details
CHF3 TrifluoromethaneContact Us for Details
Chlorocarbons Contact Us for Details
Cl2 Chlorine View Media
CO Carbon Monoxide View Media
CO2 Carbon Dioxide View Media
COS Carbonyl SulfideContact Us for Details
CS2 Carbon DisulfideContact Us for Details
Cyclo-hydrocarbons Contact Us for Details
D2 Deuterium View Media
FluorocarbonsContact Us for Details
GeCl4 Germanium TetrachlorideContact Us for Details
GeF4 Germanium TetrafluorideContact Us for Details
GeH4 GermaneContact Us for Details
GeH4 Germane (1-10%) View Media
H2 Hydrogen View Media
H2S Hydrogen SulfideContact Us for Details
H2Se Hydrogen SelenideContact Us for Details
Halocarbons View Media
HBr Hydrogen Bromide View Media
HCl Hydrogen Chloride View Media
He Helium View Media
HF Hydrogen Fluoride View Media
Hydrocarbons Contact Us for Details
Kr Krypton View Media
N2 Nitrogen View Media
N2O Nitrous Oxide View Media
Ne Neon View Media
NH3 Ammonia View Media
NO Nitric Oxide View Media
NO2 Nitrogen DioxideContact Us for Details
O2 Oxygen View Media
O3 OzoneContact Us for Details
PH3 Phosphine View Media
PH3 Phosphine (1-10%) View Media
SF6 Sulfur Hexafluoride View Media
Si2H6 DisilaneContact Us for Details
SiCl4 Silicon TetrachlorideContact Us for Details
SiClH3 MonochlorosilaneContact Us for Details
SiCl2H2 Dichlorosilane View Media
SiCl3H2 Trichlorosilane View Media
SiF4 Silicon TetrafluorideContact Us for Details
SiH3CH3 Monomethyl Silane View Media
SiH4 Silane View Media
SO2 Sulfur DioxideContact Us for Details
Xe Xenon View Media

If a gas of interest to your application does not appear in this list, please Contact Us.

Electronics & Semiconductors

Gas Purification Optimized for Semiconductor Fabrication Applications.

NANOCHEM® Gas Purifiers enable the extreme purification of gases used in wafer and semiconductor fabrication, including the removal of dopants and volatile metals.

Live gas testing is done to ensure that Nanochem gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.

NANOCHEM® purifiers remove:

  • moisture (water)
  • hydrocarbons
  • halocarbons
  • carbon dioxide
  • oxygen
  • dopants
  • volatile metals
  • more

Please inquire regarding specific impurities of interest to your application.

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Welding

Gas purification for welding applications is not limited to only the most demanding orbital welding applications. The fact is that gas contamination can interfere with welding performance in any application, and lead to oxidation, poor appearance, inconsistent bead appearance, and weld strength.

Gas purification is particularly beneficial in robotic welding, where it’s desirable to factor out as many variables as possible.

Of course, gas purification is essential in food, beverage, and medical applications.

Gas purification means less frequent operator intervention, fewer piece rejects, and better overall productivity.

WeldAssure™ Welding Gas Purifiers Features
  • Up to 50 slpm (100 cfh, 3 NM3 /hr)
  • Up to 200 psig (1.5 MPa)
  • Built-in 1-valve (4-Way valve) bypass
  • Check valve at outlet to protect canister media from air intrusion when gas flow is stopped
  • Visual end-point detection
  • Field-replaceable canister
  • Brass components and disposable aluminum canister
  • Optional refillable stainless canister
  • Optional stainless components with stainless canister
Weld Knight™ Gas Purifier Features
  • Up to 250 slpm (530 cfh, 15 NM3 /hr)
  • Up to 200 psig (1.5 MPa)
  • Built-in 1-valve (4-Way valve) bypass
  • Check valve at outlet to protect canister media from air intrusion when gas flow is stopped
  • Field-replaceable canister
  • Refillable stainless steel canister 
  • Stainless valves and fittings

Read More about NANOCHEM welding solutions:
WeldAssure™ Gas Purifiers
Weld Knight™ Gas Purifiers

Metal Additive Manufacturing

In current high-performance Metal Additive Manufacturing (3D Printing) applications, gas borne contamination can lead to problems with:

  • Mechanical integrity of deposition
  • Inconsistencies of deposition
  • Purity of the printed structure itself
  • Printing tool orifice clogging
  • Other potential issues with the printed product and the printing equipment.

Point-of-use gas purification using MATHESON 3DPro™ NANOCHEM® Purifiers restores the purity of your gases by removing these rogue impurities, and, in turn, providing consistently high gas purity output at the printing tool.

Read more about 3DPro™ :
Recirculating Expendable Purifier

NANOCHEM® Hardware Details and Specs

NANOCHEM® Media Details and Specs

Abatement Material

Purification for MOCVD Reactors